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Mass flow controller
Mass flow controller
Retail price
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Yuan
Market price
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Yuan
Number of views:
1000
Product serial number
Category
Mass Flow Device
Quantity
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+
Stock:
1
Technical Parameters
Parameters
Drawing
The mass flow controller is the key to semiconductor manufacturing equipment. It uses the principle that temperature changes correspond to mass flow and can measure and control the flow of different gases.
The mass flow controller has a wide range of applications, which can meet the working conditions of the gas flow control range from milliliters to hundreds of upgrades, and is not affected by changes in ambient temperature and pressure.
Model | FCP mass flow controller / FMM mass flowmeter | ||
Range | 10SCCM | 1SLM | 30SLM |
50SCCM | 5SLM | 50SLM | |
100SCCM | 10SLM | 75SLM | |
500SCCM | 20SLM | 100SLM | |
Accuracy | ±1%S.P.(>25%F.S.) ±0.25%F.S.(≤25%F.S.) | ||
Flow rate at fully closed control valve | ≤2% F.S. | ||
Flow rate control range | 2~100% of F.S. | ||
Flow rate measuring range(SEF) |
0~100% of F.S. | ||
linearity | ≤ ±0.5%F.S. | ||
Repeatability | ≤ ±0.2% F.S. | ||
Response | ≤1s | ||
Working differential pressure range | 50-300kPa | ||
Temperature coefficient |
Zero:≤± 0.05% F.S. per℃;Span:≤± 0.1% F.S. per℃
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Maximum working pressure | 450kPa | ||
Pressure resistance | 1MPa | ||
Leak integrity | ≤ 5 x 10 -12 Pa•m 3 /s (He) | ||
Seal material |
Viton、Buna-N、Neoprene、Kalrez、EPDM、316L
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Operating temperature | 5~50℃ | ||
Input signal |
Digital: RS485、DeviceNet、profibus、EtherCAT;Analog: 0 to 5 V DC
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Output signal | Digital: RS485、DeviceNet、profibus、EtherCAT;Analog: 0 to 5 V DC | ||
Zero stability | 0.5% F.S. / year without zero point correction | ||
Power Supply | +DC 24V | ||
Standard fitting |
VCR:1/4”、3/8”、1/2” IGS: 1.125 inch 、 1.5 inch |
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Mounting orientation
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Free
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