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Mass flow controller
Mass flow controller
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Mass Flow Device
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The mass flow controller is the key to semiconductor manufacturing equipment. It uses the principle that temperature changes correspond to mass flow and can measure and control the flow of different gases.
The mass flow controller has a wide range of applications, which can meet the working conditions of the gas flow control range from milliliters to hundreds of upgrades, and is not affected by changes in ambient temperature and pressure.
| Model | FCP mass flow controller / FMM mass flowmeter | ||
| Range | 10SCCM | 1SLM | 30SLM |
| 50SCCM | 5SLM | 50SLM | |
| 100SCCM | 10SLM | 75SLM | |
| 500SCCM | 20SLM | 100SLM | |
| Accuracy | ±1%S.P.（＞25%F.S.） ±0.25%F.S.（≤25%F.S.） | ||
| Flow at closing | ≤2% | ||
| Flow control range | 2~100% | ||
| Flow measurement range | 0~100% | ||
| linear | ≤ ±0.5%F.S. | ||
| Repeatability | ≤ ±0.2% F.S. | ||
| Response time | ≤1s | ||
| Working differential pressure range | 50-300kPa | ||
| Temperature coefficient | Zero point: ≤± 0.05% F.S. / ℃; adjustment: ≤± 0.1% F.S. / ℃ | ||
| Maximum working differential pressure | 450kPa | ||
| Withstand voltage | 1MPa | ||
| Leakage rate | ≤ 5 x 10 -12 Pa•m 3 /s (He) | ||
| Sealing material | Fluorine rubber; chloroprene rubber; metal sealing ring | ||
| Working environment temperature | 5~50℃ | ||
| Input signal | Digital: RS485 or DeviceNet analog: 0 to 5 V DC | ||
| Output signal | Digital: RS485 or DeviceNet analog: 0 to 5 V DC | ||
| Zero drift | 0.5% F.S. / year without zero point correction | ||
| Power Supply | +DC 24V | ||
| Type of power connector |
VCR：1/4”、3/8”、1/2” IGS： 1.125 inch 、 1.5 inch |
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| Installation direction | D-type 9-pin male, 5-pin M12 connector | ||
| Standard joint form | Arbitrarily | ||
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