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Mass flow controller

FELTON
fei

Mass flow controller

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Technical Parameters
Parameters
Drawing

The mass flow controller is the key to semiconductor manufacturing equipment. It uses the principle that temperature changes correspond to mass flow and can measure and control the flow of different gases.
The mass flow controller has a wide range of applications, which can meet the working conditions of the gas flow control range from milliliters to hundreds of upgrades, and is not affected by changes in ambient temperature and pressure.

Model FCP mass flow controller / FMM mass flowmeter
Range 10SCCM 1SLM 30SLM
50SCCM 5SLM 50SLM
100SCCM 10SLM 75SLM
500SCCM 20SLM 100SLM
Accuracy ±1%S.P.(>25%F.S.) ±0.25%F.S.(≤25%F.S.)
Flow rate at fully closed control valve ≤2% F.S.
Flow rate control range 2~100% of F.S.

Flow rate measuring range(SEF)

0~100% of F.S.
linearity ≤ ±0.5%F.S. 
Repeatability ≤ ±0.2% F.S.
Response ≤1s
Working differential pressure range 50-300kPa
Temperature coefficient
Zero:≤± 0.05% F.S. per℃;Span:≤± 0.1% F.S. per℃
Maximum working pressure 450kPa
Pressure resistance 1MPa
Leak integrity ≤ 5 x 10 -12 Pa•m 3 /s (He)
Seal material
Viton、Buna-N、Neoprene、Kalrez、EPDM、316L
Operating temperature 5~50℃
Input signal
Digital: RS485、DeviceNet、profibus、EtherCAT;Analog: 0 to 5 V DC
Output signal Digital: RS485、DeviceNet、profibus、EtherCAT;Analog: 0 to 5 V DC
Zero stability 0.5% F.S. / year without zero point correction
Power Supply +DC 24V
Standard fitting

VCR:1/4”、3/8”、1/2”

IGS: 1.125 inch 、 1.5 inch 

Mounting orientation
Free

 

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