Mass flow controller

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Mass flow controller

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Yuan

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Mass Flow Device

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Technical Parameters

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The mass flow controller is the key to semiconductor manufacturing equipment. It uses the principle that temperature changes correspond to mass flow and can measure and control the flow of different gases.
The mass flow controller has a wide range of applications, which can meet the working conditions of the gas flow control range from milliliters to hundreds of upgrades, and is not affected by changes in ambient temperature and pressure.

Model	FCP mass flow controller / FMM mass flowmeter
Range	10SCCM	1SLM	30SLM
	50SCCM	5SLM	50SLM
	100SCCM	10SLM	75SLM
	500SCCM	20SLM	100SLM
Accuracy	±1%S.P.（＞25%F.S.） ±0.25%F.S.（≤25%F.S.）
Flow rate at fully closed control valve	≤2% F.S.
Flow rate control range	2~100% of F.S.
Flow rate measuring range(SEF)	0~100% of F.S.
linearity	≤ ±0.5%F.S.
Repeatability	≤ ±0.2% F.S.
Response	≤1s
Working differential pressure range	50-300kPa
Temperature coefficient	Zero:≤± 0.05% F.S. per℃；Span:≤± 0.1% F.S. per℃
Maximum working pressure	450kPa
Pressure resistance	1MPa
Leak integrity	≤ 5 x 10 -12 Pa•m 3 /s (He)
Seal material	Viton、Buna-N、Neoprene、Kalrez、EPDM、316L
Operating temperature	5~50℃
Input signal	Digital: RS485、DeviceNet、profibus、EtherCAT；Analog: 0 to 5 V DC
Output signal	Digital: RS485、DeviceNet、profibus、EtherCAT；Analog: 0 to 5 V DC
Zero stability	0.5% F.S. / year without zero point correction
Power Supply	+DC 24V
Standard fitting	VCR：1/4”、3/8”、1/2” IGS： 1.125 inch 、 1.5 inch
Mounting orientation	Free

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