Mass flow controller

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Mass flow controller

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Mass Flow Device

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The mass flow controller is the key to semiconductor manufacturing equipment. It uses the principle that temperature changes correspond to mass flow and can measure and control the flow of different gases.
The mass flow controller has a wide range of applications, which can meet the working conditions of the gas flow control range from milliliters to hundreds of upgrades, and is not affected by changes in ambient temperature and pressure.

Model	TCP mass flow controller
Range	5SCCM	1SLM	30SLM
	50SCCM	5SLM	50SLM
	100SCCM	10SLM	100SLM
	500SCCM	20SLM	500SLM
Accuracy	±1%S.P.（Q＞20%F.S.） ±0.2%F.S.（Q≤20%F.S.）
Flow rate at fully closed control valve	≤0.5% F.S.
Flow rate measurement range	0.5~100% F.S.
Flow rate control range	1.5~100% F.S.
linearity	≤ ±0.5%F.S.
Repeatability	≤ ±0.2% F.S.
Response	≤0.7s（Varies depending on the range）
Temperature coefficient	≤± 0.02% S.P. /℃
Maximum working pressure	0.5Mpa
Leak integrity	≤ 5 x 10 -12 Pa•m 3 /sec (He)
Operating ambient temperature	5~50℃
Input signal	Digital: RS485、DeviceNet、profibus、EtherCAT；Analog: 0 to 5 V DC（4-20mA）
Output signal	Digital: RS485、DeviceNet、profibus、EtherCAT；Analog: 0 to 5 V DC（4-20mA）
Standard fitting	VCR：1/4”、1/2” IGS： 1.125 inch 、 1.5 inch （C-Seal、W-Seal） Swagelok：1/4"、3/8"、1/2"

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