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Mass flow controller
Mass flow controller
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Yuan
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Yuan
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1000
Product serial number
Category
Mass Flow Device
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+
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1
Technical Parameters
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The mass flow controller is the key to semiconductor manufacturing equipment. It uses the principle that temperature changes correspond to mass flow and can measure and control the flow of different gases.
The mass flow controller has a wide range of applications, which can meet the working conditions of the gas flow control range from milliliters to hundreds of upgrades, and is not affected by changes in ambient temperature and pressure.
Model | TCP mass flow controller | ||
Range | 5SCCM | 1SLM | 30SLM |
50SCCM | 5SLM | 50SLM | |
100SCCM | 10SLM | 100SLM | |
500SCCM | 20SLM | 500SLM | |
Accuracy | ±1%S.P.(Q>20%F.S.) ±0.2%F.S.(Q≤20%F.S.) | ||
Flow rate at fully closed control valve | ≤0.5% F.S. | ||
Flow rate measurement range | 0.5~100% F.S. | ||
Flow rate control range | 1.5~100% F.S. | ||
linearity | ≤ ±0.5%F.S. | ||
Repeatability | ≤ ±0.2% F.S. | ||
Response | ≤0.7s(Varies depending on the range) | ||
Temperature coefficient |
≤± 0.02% S.P. /℃
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Maximum working pressure | 0.5Mpa | ||
Leak integrity | ≤ 5 x 10 -12 Pa•m 3 /sec (He) | ||
Operating ambient temperature | 5~50℃ | ||
Input signal |
Digital: RS485、DeviceNet、profibus、EtherCAT;Analog: 0 to 5 V DC(4-20mA)
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Output signal | Digital: RS485、DeviceNet、profibus、EtherCAT;Analog: 0 to 5 V DC(4-20mA) | ||
Standard fitting |
VCR:1/4”、1/2” IGS: 1.125 inch 、 1.5 inch (C-Seal、W-Seal) Swagelok:1/4"、3/8"、1/2" |
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